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Practical Guide to RF-MEMS
Jacopo Iannacci
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Naturwissenschaften, Medizin, Informatik, Technik / Elektronik, Elektrotechnik, Nachrichtentechnik
Description
Providing researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts, this book deals with modeling, design, simulation, optimization, fabrication and characterization of MEMS for radiofrequency applications. To begin with, prototypical RF-MEMS devices, including lumped components and complex networks, are presented as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. The text explicitly treats the hard-to-predict interplay between the three-dimensional device structure and its electromagnetic functionality. Theoretical concepts are introduced when necessary to complement the practical hints given for all RF-MEMS development stages, and simulation results are validated against experimental results. With its design and simulation examples based on such widely-known software packages as ANSYS and the hardware description language Verilog, this guide will appeal to the practice-oriented R&D reader.
customer reviews
Nanotechnology, Elektrotechnik u. Elektronik, Halbleiterphysik, Electrical & Electronics Engineering, Physik, Analysis/Characterization of Nanosystems, Materials Science, Physics, Materialwissenschaften, MEMS, Materialwissenschaften / Theorie, Modellierung u. Simulation, Semiconductor Physics, Analyse u. Charakterisierung von Nanosystemen, Theory, Modeling & Simulation, Nanotechnologie